Patent US 4331476A
Patent number | US 4331476A (click link for details and documents via Google Patents) |
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Title | Sputtering targets with low mobile ion contamination |
Inventors | Earl R. Helderman, Robert R. Zimmerman |
Company | Tektronix Inc |
Filing date | 1980-01-31 |
Grant date | 1982-05-25 |