Patent US 4923825A
Patent number | US 4923825A (click link for details and documents via Google Patents) |
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Title | Method of treating a semiconductor body |
Inventors | Morley M. Blouke, Thaian N. Tran, Marjorie L. Lust |
Company | Tektronix Inc |
Filing date | 1989-05-01 |
Grant date | 1990-05-08 |