Patent US 4331476A
| Patent number | US 4331476A (click link for details and documents via Google Patents) |
|---|---|
| Title | Sputtering targets with low mobile ion contamination |
| Inventors | Earl R. Helderman, Robert R. Zimmerman |
| Company | Tektronix Inc |
| Filing date | 1980-01-31 |
| Grant date | 1982-05-25 |