Patent US 4732865A

Patent number	US 4732865A (click link for details and documents via Google Patents)
Title	Self-aligned internal mobile ion getter for multi-layer metallization on integrated circuits
Inventors	David R. Evans, James S. Flores, Susan S. Dottarar
Company	Tektronix Inc
Filing date	1986-10-03
Grant date	1988-03-22