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Patent US 4994400A

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Patent number US 4994400A (click link for details and documents via Google Patents)
Title Method of fabricating a semiconductor device using a tri-layer structure and conductive sidewalls
Inventors Tadanori Yamaguchi, Yeou-Chong S. Yu, Carol A. Hacherl, Evan E. Patton
Company Tektronix Inc
Filing date 1989-01-27
Grant date 1991-02-19



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