Patent AU 2001238550

Patent number	AU 2001238550 (click link for details and documents via Google Patents)
Title	Membrane probing system
Inventors	Gene Cowan, Mike P. Dauphinais, Martin J. Koxxy, Kenneth R. Smith, Paul A. Tervo
Company	Cascade Microtech, Inc.
Filing date	2000-02-25
Grant date	2001-02-20