Patent US 4656076A

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Patent number US 4656076A (click link for details and documents via Google Patents)
Title Self-aligned recessed gate process
Inventors William A. Vetanen, Kimberly R. Gleason, Irene G. Beers
Company Triquint Semiconductors, Inc.
Filing date 1985-04-26
Grant date 1987-04-07



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