Patent US 4656076A

Patent number	US 4656076A (click link for details and documents via Google Patents)
Title	Self-aligned recessed gate process
Inventors	William A. Vetanen, Kimberly R. Gleason, Irene G. Beers
Company	Triquint Semiconductors, Inc.
Filing date	1985-04-26
Grant date	1987-04-07