Patent US 6930498

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Patent number US 6930498 (click link for details and documents via Google Patents)
Title Membrane probing system
Inventors Paul A. Tervo, Kenneth R. Smith, Clarence E. Cowan, Mike P. Dauphinais, Martin J. Koxxy
Company Cascade Microtech, Inc.
Filing date 2000-02-25
Grant date 2004-07-29



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