Patent US 6930498

Patent number	US 6930498 (click link for details and documents via Google Patents)
Title	Membrane probing system
Inventors	Paul A. Tervo, Kenneth R. Smith, Gene Cowan, Mike P. Dauphinais, Martin J. Koxxy
Company	Cascade Microtech, Inc.
Filing date	2000-02-25
Grant date	2004-07-29