Patent US 6930498
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| Patent number | US 6930498 |
|---|---|
| Title | Membrane probing system |
| Inventors | Paul A. Tervo, Kenneth R. Smith, Gene Cowan, Mike P. Dauphinais, Martin J. Koxxy |
| Company | Cascade Microtech, Inc. |
| Filing date | 2000-02-25 |
| Grant date | 2004-07-29 |
| Cites |