Patent AU 2001238550
| Patent number | AU 2001238550 (click link for details and documents via Google Patents) |
|---|---|
| Title | Membrane probing system |
| Inventors | Gene Cowan, Mike P. Dauphinais, Martin J. Koxxy, Kenneth R. Smith, Paul A. Tervo |
| Company | Cascade Microtech, Inc. |
| Filing date | 2000-02-25 |
| Grant date | 2001-02-20 |