Patent AU 2001238550
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Patent number | AU 2001238550 (click link for details and documents via Google Patents) |
---|---|
Title | Membrane probing system |
Inventors | Gene Cowan, Mike P. Dauphinais, Martin J. Koxxy, Kenneth R. Smith, Paul A. Tervo |
Company | Cascade Microtech, Inc. |
Filing date | 2000-02-25 |
Grant date | 2001-02-20 |