Patent US 7550984

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Patent number US 7550984 (click link for details and documents via Google Patents)
Title Probe station with low noise characteristics
Inventors Timothy Lesher, Brad Miller, Gene Cowan, Michael Simmons, Frank Gray, Cynthia L. McDonald
Company Cascade Microtech, Inc.
Filing date 2002-11-08
Grant date 2007-10-04



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