Patent US 7550984
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| Patent number | US 7550984 (click link for details and documents via Google Patents) |
|---|---|
| Title | Probe station with low noise characteristics |
| Inventors | Timothy Lesher, Brad Miller, Gene Cowan, Michael Simmons, Frank Gray, Cynthia L. McDonald |
| Company | Cascade Microtech, Inc. |
| Filing date | 2002-11-08 |
| Grant date | 2007-10-04 |