Patent US 7616017

From TekWiki

Revision as of 07:34, 2 September 2021 by Maintenance script (talk | contribs)

(diff) ← Older revision | Latest revision (diff) | Newer revision → (diff)

Jump to navigation Jump to search

Patent number	US 7616017
Title	Probe station thermal chuck with shielding for capacitive current
Inventors	Gene Cowan, Paul A. Tervo, John L. Dunklee
Company	Cascade Microtech, Inc.
Filing date	1999-06-30
Grant date	2007-10-17
Cites

Retrieved from "https://w140.com/tekwiki/index.php?title=Patent_US_7616017&oldid=68512"

Patents