Patent US 7616017
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| Patent number | US 7616017 (click link for details and documents via Google Patents) |
|---|---|
| Title | Probe station thermal chuck with shielding for capacitive current |
| Inventors | Gene Cowan, Paul A. Tervo, John L. Dunklee |
| Company | Cascade Microtech, Inc. |
| Filing date | 1999-06-30 |
| Grant date | 2007-10-17 |