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Patent US 7616017: Difference between revisions
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|Title=Probe station thermal chuck with shielding for capacitive current | |Title=Probe station thermal chuck with shielding for capacitive current | ||
|Company=Cascade Microtech, Inc. | |Company=Cascade Microtech, Inc. | ||
|Inventors=Gene Cowan | |Inventors=Gene Cowan; Paul A. Tervo; John L. Dunklee | ||
|Filing date=1999-06-30 | |Filing date=1999-06-30 | ||
|Grant date=2007-10-17 | |Grant date=2007-10-17 | ||
}} | }} | ||