Patent US 3134077A
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Patent number | US 3134077A (click link for details and documents via Google Patents) |
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Title | Electrical probe apparatus for measuring the characteristics of semiconductor material |
Inventors | Thomas B Hutchins IV, William C Myers, Jean F DeLord |
Company | Tektronix Inc |
Filing date | 1961-09-18 |
Grant date | 1964-05-19 |