Patent US 4217599A
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Patent number | US 4217599A (click link for details and documents via Google Patents) |
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Title | Narrow channel MOS devices and method of manufacturing |
Inventors | Shuichi Sato, Tadanori Yamaguchi, Arthur D. Ritchie |
Company | Tektronix Inc |
Filing date | 1977-12-21 |
Grant date | 1980-08-12 |