Patent US 4260425A
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| Patent number | US 4260425A (click link for details and documents via Google Patents) |
|---|---|
| Title | Phosphorus removal from surface regions of phosphosilicate glass microcircuit layers |
| Inventors | Ralph P. Ulrich, Deborah W. Hewitt |
| Company | Tektronix Inc |
| Filing date | 1979-04-04 |
| Grant date | 1981-04-07 |