Patent US 4566186A
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Patent number | US 4566186A (click link for details and documents via Google Patents) |
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Title | Multilayer interconnect circuitry using photoimageable dielectric |
Inventors | Charles E. Bauer, William A. Bold |
Company | Tektronix Inc |
Filing date | 1984-06-29 |
Grant date | 1986-01-28 |