Patent US 4606113A
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Patent number | US 4606113A (click link for details and documents via Google Patents) |
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Title | Method of manufacturing metal-semiconductor field effect transistors using orientation dependent etched recesses of different depths |
Inventors | Ajit G. Rode |
Company | Triquint Semiconductor, Inc. |
Filing date | 1985-03-25 |
Grant date | 1986-08-19 |