Patent US 4642259A
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Patent number | US 4642259A (click link for details and documents via Google Patents) |
---|---|
Title | Source-side self-aligned gate process |
Inventors | William A. Vetanen, Kimberly R. Gleason, Irene G. Beers |
Company | Triquint Semiconductors, Inc. |
Filing date | 1985-04-26 |
Grant date | 1987-02-10 |