Patent US 4673839A
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| Patent number | US 4673839A (click link for details and documents via Google Patents) |
|---|---|
| Title | Piezoelectric pressure sensing apparatus for integrated circuit testing stations |
| Inventors | Cornelis Teunis Veenendaal |
| Company | Tektronix Inc |
| Filing date | 1986-09-08 |
| Grant date | 1987-06-16 |