Patent US 4732865A
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| Patent number | US 4732865A (click link for details and documents via Google Patents) |
|---|---|
| Title | Self-aligned internal mobile ion getter for multi-layer metallization on integrated circuits |
| Inventors | David R. Evans, James S. Flores, Susan S. Dottarar |
| Company | Tektronix Inc |
| Filing date | 1986-10-03 |
| Grant date | 1988-03-22 |