Patent US 4749942A
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| Patent number | US 4749942A (click link for details and documents via Google Patents) |
|---|---|
| Title | Wafer probe head |
| Inventors | Emmanuel Sang, Gary L. Estabrook |
| Company | Tektronix Inc |
| Filing date | 1987-06-02 |
| Grant date | 1988-06-07 |