Patent US 4847445A
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| Patent number | US 4847445A (click link for details and documents via Google Patents) |
|---|---|
| Title | Zirconium thin-film metal conductor systems |
| Inventors | Earl R. Helderman, Robert Holmes, Robert R. Zimmerman |
| Company | Tektronix Inc |
| Filing date | 1985-02-01 |
| Grant date | 1989-07-11 |