Patent US 4853627A

Patent number	US 4853627A (click link for details and documents via Google Patents)
Title	Wafer probes
Inventors	Kimberly R. Gleason, Eric W. Strid, Robert T. Flegal, Angus J. McCamant
Company	Triquint Semiconductor, Inc.
Filing date	1988-07-11
Grant date	1989-08-01