Patent US 7616017: Difference between revisions
Jump to navigation
Jump to search
No edit summary |
No edit summary |
||
| Line 4: | Line 4: | ||
|Title=Probe station thermal chuck with shielding for capacitive current | |Title=Probe station thermal chuck with shielding for capacitive current | ||
|Company=Cascade Microtech, Inc. | |Company=Cascade Microtech, Inc. | ||
|Inventors=Gene Cowan | |Inventors=Gene Cowan; Paul A. Tervo; John L. Dunklee | ||
|Filing date=1999-06-30 | |Filing date=1999-06-30 | ||
|Grant date=2007-10-17 | |Grant date=2007-10-17 | ||
}} | }} | ||
Latest revision as of 06:39, 2 September 2021
| Patent number | US 7616017 (click link for details and documents via Google Patents) |
|---|---|
| Title | Probe station thermal chuck with shielding for capacitive current |
| Inventors | Gene Cowan, Paul A. Tervo, John L. Dunklee |
| Company | Cascade Microtech, Inc. |
| Filing date | 1999-06-30 |
| Grant date | 2007-10-17 |