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|Title=Integrated circuit probe station | |Title=Integrated circuit probe station | ||
|Company=Tektronix Inc | |Company=Tektronix Inc | ||
|Inventors=Delmer E. Snyder; Cornelis | |Inventors=Delmer E. Snyder; Cornelis Teunis Veenendaal; Theodore G. Creedon | ||
|Filing date=1986-09-08 | |Filing date=1986-09-08 | ||
|Grant date=1990-02-27 | |Grant date=1990-02-27 | ||
}} | }} |