Patent US 7550984
Patent number | US 7550984 (click link for details and documents via Google Patents) |
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Title | Probe station with low noise characteristics |
Inventors | Timothy Lesher, Brad Miller, Gene Cowan, Michael Simmons, Frank Gray, Cynthia L. McDonald |
Company | Cascade Microtech, Inc. |
Filing date | 2002-11-08 |
Grant date | 2007-10-04 |