Patent US 7616017

From TekWiki
Revision as of 06:39, 2 September 2021 by Maintenance script (talk | contribs)
(diff) ← Older revision | Latest revision (diff) | Newer revision → (diff)
Jump to navigation Jump to search
Patent number US 7616017 (click link for details and documents via Google Patents)
Title Probe station thermal chuck with shielding for capacitive current
Inventors Gene Cowan, Paul A. Tervo, John L. Dunklee
Company Cascade Microtech, Inc.
Filing date 1999-06-30
Grant date 2007-10-17