Patent US 4994400A
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| Patent number | US 4994400A (click link for details and documents via Google Patents) |
|---|---|
| Title | Method of fabricating a semiconductor device using a tri-layer structure and conductive sidewalls |
| Inventors | Tadanori Yamaguchi, Yeou-Chong S. Yu, Carol A. Hacherl, Evan E. Patton |
| Company | Tektronix Inc |
| Filing date | 1989-01-27 |
| Grant date | 1991-02-19 |