Patent US 7498828
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| Patent number | US 7498828 (click link for details and documents via Google Patents) |
|---|---|
| Title | Probe station with low inductance path |
| Inventors | John Dunklee, Gene Cowan |
| Company | Cascade Microtech, Inc. |
| Filing date | 2002-11-25 |
| Grant date | 2007-06-20 |