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|Title=Membrane probing system | |Title=Membrane probing system | ||
|Company=Cascade Microtech, Inc. | |Company=Cascade Microtech, Inc. | ||
|Inventors= | |Inventors=Gene Cowan, Mike P. Dauphinais, Martin J. Koxxy, Kenneth R. Smith, Paul A. Tervo | ||
|Filing date=2000-02-25 | |Filing date=2000-02-25 | ||
|Grant date=2001-02-20 | |Grant date=2001-02-20 | ||
}} | }} |
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