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Patent US 7498828: Difference between revisions
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|Title=Probe station with low inductance path | |Title=Probe station with low inductance path | ||
|Company=Cascade Microtech, Inc. | |Company=Cascade Microtech, Inc. | ||
|Inventors=John Dunklee, | |Inventors=John Dunklee, Gene Cowan | ||
|Filing date=2002-11-25 | |Filing date=2002-11-25 | ||
|Grant date=2007-06-20 | |Grant date=2007-06-20 | ||
}} | }} | ||