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|series=560-series scopes
|series=560-series scopes
|model=564
|model=564
|summary=Split-screen storage scope
|summary=Split-Screen Storage Scope
|image=564-3l5-3b4.jpg
|image=564-3l5-3b4.jpg
|caption=Tektronix 564 with [[3L5]] and [[3B4]] plugins
|caption=Tektronix 564 with [[3L5]] and [[3B4]] Plugins
|introduced=1962
|introduced=1962
|discontinued=1974
|discontinued=1974
Line 11: Line 11:
|manuals=
|manuals=
====564====
====564====
* [[Media:070-351.pdf|Tektronix 564 Manual]] (PDF)
* [[Media:070-351.pdf                     | Tektronix 564 Manual]]<br /><small>Alternate: [https://bama.edebris.com/download/tek/564/tek%20564.v6.pdf PDF @ BAMA]</small>
* [https://bama.edebris.com/download/tek/564/tek%20564.v6.pdf Tektronix 564 Manual] (PDF @ BAMA)]
* [[Media:Tek 564 irb.pdf                 | Tektronix 564 Instrument Reference Book]]
* [[Media:Tek 564 irb no ocr.pdf|Tektronix 564 Instrument Reference Book]] (PDF, needs OCR)
* [[Media:Tek 564 fcp 061-570.pdf         | Tektronix 564 Factory Calibration Procedure]]
* [[Media:Tek 564 fcp 061-570 no ocr.pdf|Tektronix 564 Factory Calibration Procedure]] (PDF, needs OCR)
* [[Media:Tek 564 storage cal outline.pdf | Tektronix 564 Calibration Outline]]
* [[Media:Tek 564 storage cal outline.pdf]]


====564B====
====564B====
* [https://w140.com/mmm/tek-564b.pdf Tektronix 564B Manual] (PDF)
* [[Media:070-0804-00.pdf                 | Tektronix 564B Manual 070-0804-00]]<br /><small>Alternate: [https://bama.edebris.com/download/tek/564b/Tek%20564B%20Instr%20Man.pdf PDF @ BAMA]</small>
* [https://bama.edebris.com/download/tek/564b/Tek%20564B%20Instr%20Man.pdf Tektronix 564B Manual] (PDF @ BAMA)
* ''[[Media:070-0805-00.pdf              | Tektronix RM564B 070-0805-00]] needed''
* [https://bama.edebris.com/download/tek/564mod121n/Tek%20564%20Mod%20121N.pdf Tektronix 564B with Mod 121N Manual]] (PDF @ BAMA)
* [[Media:070-0806-00.pdf                | Tektronix 564B Mod.121N 070-0806-00]]<br /><small>Alternate: [https://bama.edebris.com/download/tek/564mod121n/Tek%20564%20Mod%20121N.pdf PDF @ BAMA]</small>
* [[Media:Tek 564b and mod 121n fcp no ocr.pdf|Tektronix 564B and 564B Mod 121N Factory Calibration Procedure]] (PDF, needs OCR)
* [[Media:Tek 564b and mod 121n fcp.pdf   | Tektronix 564B and 564B MOD121N Factory Calibration Procedure]]
}}
}}
The '''Tektronix 564''' is the [[CRT_storage_scope|storage scope]] of the [[560-series scopes|560 series]], [[introduced in 1962|introduced in June 1962]].  
The '''Tektronix 564''' is the [[CRT_storage_scope | storage scope]] of the [[560-series scopes | 560 series]], [[introduced in 1962 | introduced in June 1962]].  
It takes two [[560-series plug-ins|2- or 3-series plug-ins]]. The RM564 is the rack-mount version.   
It takes two [[560-series plug-ins | 2- or 3-series plug-ins]]. The RM564 is the rack-mount version.   


The 564 is a tube-based oscilloscope, whereas a later version, the '''564B''' (1969), is fully solid state.
The 564 is a tube-based oscilloscope, whereas a later version, the '''564B''' (1969), is fully solid state.
Mod 121N added auto-erase. The screen has bi-stable storage in two 4 cm × 10 cm sections, allowing independent saving and erasing of the upper and lower half.
MOD121N added auto-erase. The screen has bi-stable storage in two 4 cm × 10 cm sections, allowing independent saving and erasing of the upper and lower half.


The 564 was one of the mainframes offered for the [[Engine Analyzer]] package.
The 564 was one of the mainframes offered for the [[Engine Analyzer System]].
 
The designer of the 564 was [[Bob Shand]].


{{BeginSpecs}}
{{BeginSpecs}}
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{{Spec | Writing speed | ≥25 Div/ms with T5640-200; ≥100 Div/ms with T5640-201 }}
{{Spec | Writing speed | ≥25 Div/ms with T5640-200; ≥100 Div/ms with T5640-201 }}
{{Spec | Storage time | At least 1 hour }}
{{Spec | Storage time | At least 1 hour }}
{{Spec | CRT | 8×10 Div @ 1 cm/Div, external graticule; tube [[154-0410-00]]/[[154-0565-00]] (standard, P200) / [[154-0418-00]]/[[154-0565-01]] (fast writing speed, P201); 3.5 kV acceleration }}
{{Spec | CRT | 8×10 Div @ 1 cm/Div, 3.5 kV acceleration
''564'' (external graticule): Standard CRT, T5640-200 ([[154-0410-00]]); Fast Writing Speed, T5640-201 ([[154-0418-00]])
 
''564B'' (internal graticule): Standard CRT, T5641-200 ([[154-0565-00]]); Fast Writing Speed, T5641-201 ([[154-0565-01]]) }}
 
{{Spec | Calibrator | ''564'': 0.2 mV to 100 V<sub>p-p</sub> in 18 2-5-10 steps, square wave at line frequency
{{Spec | Calibrator | ''564'': 0.2 mV to 100 V<sub>p-p</sub> in 18 2-5-10 steps, square wave at line frequency
''RM564'': 1 mV to 100 V in 6 decade steps, square wave at line frequency
''564B'': 4 mV to 40 V<sub>p-p</sub> in 5 decade steps, square wave at 1 kHz, plus 40 VDC into high impedance, and 2 mV to 0.2 V into 50 Ohms in 3 decade steps.}}
''564B'': 4 mV to 40 V<sub>p-p</sub> in 5 decade steps, square wave at 1 kHz, plus 40 VDC into high impedance, and 2 mV to 0.2 V into 50 Ohms in 3 decade steps.}}
{{Spec | Power | 105−125 V or 210−250 V, 50 to 400 Hz, Convection cooling, thermal cut-off switch; ''564'': 250 W maximum; ''564B'': 196 W maximum}}
{{Spec | Power | 105−125 V or 210−250 V, 50 to 400 Hz, Convection cooling, thermal cut-off switch
{{Spec | Weight | Without plugins: ''564'' ~13.8 kg (30.5 lbs), ''564B ~14.2 kg (31.25 lbs)}}
''564'': 250 W maximum
 
''564B'': 196 W maximum}}
{{Spec | Weight | Without plugins: ''564'' ~13.8 kg (30.5 lbs), ''564B'' ~14.2 kg (31.25 lbs)}}
{{EndSpecs}}
{{EndSpecs}}


Steve Ditter says:
Steve Ditter says:
<blockquote>
<blockquote>
Tek offered two [[phosphor]]s for the 564. You can determine which one you have by
Tektronix offered two [[phosphor]]s for the 564. You can determine which one you have by
reading the CRT part number, visible in the window in the shield where the
reading the CRT part number, visible in the window in the shield where the
deflection plate connections are. [[154-0410-00]] is P200, which was the standard
deflection plate connections are. [[154-0410-00]] is P200, which was the standard
Line 50: Line 60:
expense of about 30% shorter useful life.
expense of about 30% shorter useful life.
</blockquote>
</blockquote>
==Links==
==Links==
* Tek [http://www.barrytech.com/tektronix/vintage/tek564.html 564] / [http://www.barrytech.com/tektronix/vintage/tekrm564.html RM564] @ barrytech.com
* Tek [http://www.barrytech.com/tektronix/vintage/tek564.html 564] / [http://www.barrytech.com/tektronix/vintage/tekrm564.html RM564] @ barrytech.com
* [http://www.thevalvepage.com/testeq/tek/564/564.htm J.Evans's 564 page]
* [http://www.thevalvepage.com/testeq/tek/564/564.htm         J.Evans's 564 page]
* [http://users.monash.edu.au/~ralphk/scope564.html Ralph K's 564 pictures page]
* [http://users.monash.edu.au/~ralphk/scope564.html           Ralph K's 564 pictures page]
* A [https://www.youtube.com/watch?v=QkcVwRKy6Jk 564 @ YouTube] / [https://www.youtube.com/watch?v=1DtQk8Tj7Ls another one]
* A [https://www.youtube.com/watch?v=QkcVwRKy6Jk             564 @ YouTube] / [https://www.youtube.com/watch?v=1DtQk8Tj7Ls another one]
{{Documents|Link=564}}
{{Documents|Link=564A}}
{{Documents|Link=564B}}
{{PatentLinks|564}}
{{PatentLinks|564A}}
{{PatentLinks|564B}}


==Internals==
==Internals==
Line 60: Line 77:


==Accessories==
==Accessories==
The 012-0102-00 Storage Oscilloscope Control Unit that works with the 549 also works with the 564B but not the 564. It provides (corded) remote reset of the sweep and independent erase of the upper and lower storage areas.
The [[012-0102-00]] Storage Oscilloscope Control Unit that works with the [[549]] also works with the 564B but not the 564. It provides (corded) remote reset of the sweep and independent erase of the upper and lower storage areas.


==Pictures==
==Pictures==


====564====
====564 External Views====
<gallery>
564-3l5-3b4.jpg                | 564 with [[3L5]] and [[3B4]] Plugins
USA Tektronix 564 Front0.jpg  | 564 Front
Tek 564 trace.jpg              | 564 Trace
Tek564 front.jpg              | 564 Front Panel
Tek 564 display.Jpg            | 564 Display
Tek564 storage display.jpg    | 564 Display (in Storage Mode)
Tek564 back.jpg                | 564 Back
Tek564 left.jpg                | 564 Left
Tek564 right.jpg              | 564 Right
Tek 564 with viewing hood.jpg  | 564 with Viewing Hood on a [[201| 201-2]] Cart
Tek 564 with viewing hood2.jpg | 564 with Viewing Hood on a [[201| 201-2]] Cart
</gallery>
 
====564 Internal Views====
<gallery>
Tek564 left internals 4.jpg | 564 Left Internals
Tek564 left internals 5.jpg | 564 Left Internals
Tek564 left internals 2.jpg | 564 Left Internals
Tek564 left internals 3.jpg | 564 Left Internals
Tek564 right internals 4.jpg| 564 Right Internals
Tek564 right internals 5.jpg| 564 Right Internals
Tek564 right internals 2.jpg| 564 Right Internals
Tek564 right internals 7.jpg| 564 Right Internals
Tek564 right internals 6.jpg| 564 Right Internals
Tek564 right internals 8.jpg| 564 Right Internals
Tek564 right internals 9.jpg| 564 Right Internals
Tek_564_HV.jpg              | 564 HV Section - Cover Removed
</gallery>
 
====564 Schematics====
<gallery>
<gallery>
564-3l5-3b4.jpg | 564 with [[3L5]] and [[3B4]] plugins
Tek 564 block.png                  | 564 Block Diagram
USA Tektronix 564 Front0.jpg
Tek 564 power supply.png            | 564 Power Supply
Tek 564 trace.jpg
Tek 564 interconnecting sockets.png | 564 Interconnecting Sockets
Tek564 front.jpg|Tektronix 564 Front Panel
Tek 564 crt circuit.png            | 564 CRT Circuit
Tek 564 display.Jpg|564, Display
Tek 564 calibrator.png              | 564 Calibrator
Tek564 storage display.jpg|Tektronix 564 Display (in Storage Mode)
Tek 564 storage circuit.png        | 564 Storage Circuit
Tek564 back.jpg|Tektronix 564 Back
Tek564 left.jpg|Tektronix 564 Left
Tek564 right.jpg|Tektronix 564 Right
Tek 564 with viewing hood.jpg|564 with viewing hood on a [[201]] cart
Tek 564 with viewing hood2.jpg|564 with viewing hood on a [[201]] cart
</gallery>
</gallery>


====564 Versions====
====564 Versions====
<gallery>
<gallery>
564_(1).jpg|564 version 1
564_(1).jpg   | 564 Version 1
564_(2).jpg|564 version 2
564_(2).jpg   | 564 Version 2
564_(3).jpg|564 version 3
564_(3).jpg   | 564 Version 3
</gallery>
</gallery>


Line 89: Line 132:
<gallery>
<gallery>
Tek RM564.jpg
Tek RM564.jpg
Tek rm564 front left.jpg|RM564, Switch for storage
Tek rm564 front left.jpg   | RM564, Switch for Storage
Tek rm564 inside top.jpg|RM564, Chassis
Tek rm564 inside top.jpg   | RM564, Chassis
Tek rm564 inside bottom.jpg|RM564, Chassis bottom
Tek rm564 inside bottom.jpg | RM564, Chassis Bottom
</gallery>
</gallery>


====564B====
====564B====
<gallery>
<gallery>
Tek564b-3a3-3b3.jpg | 564B with [[3A3]] and [[3B3]]
Tek564b-3a3-3b3.jpg                   | 564B with [[3A3]] and [[3B3]]
Tek 564b 1.JPG|564B
Tek 564b 1.JPG                       | 564B
Tek 564b 2.JPG|564B
Tek 564b 2.JPG                       | 564B
Tek 564b 3.JPG|564B
Tek 564b 3.JPG                       | 564B
Tek 564b 4.JPG|564B
Tek 564b 4.JPG                       | 564B
Heerenveen 564b with 3a74 and 3b3.jpg|564B with [[3A74]] and [[3B3]] made in The Netherlands
Heerenveen 564b with 3a74 and 3b3.jpg | 564B with [[3A74]] and [[3B3]] Made in The Netherlands
</gallery>
</gallery>


====564B with Auto Erase, MOD121N====
====564B with Auto Erase, MOD121N====
<gallery>
<gallery>
Tek 564b on cart.jpg|564B/MOD121N on cart
Tek 564b on cart.jpg   | 564B/MOD121N on [[201| 201-2]] Cart
</gallery>
</gallery>


====R564B====
====R564B with Auto Erase, MOD121N====
<gallery>
<gallery>
R564B_1.JPG|R564B w auto-erase and 3A6 and 3B3
R564B_1.JPG             | R564B/MOD121N with 3A6 and 3B3
</gallery>
</gallery>


====Schematics====
====Third-Party Instruments Based on the 564====
<gallery>
<gallery>
Tek 564 block.png|564 Block Diagram
Physionic 671 1.jpg | [[Physionic 671|Physionic 671 Ultrasonic Imager]], Based on the 564
Tek 564 power supply.png|564 Power Supply
Physionic 671 2.jpg | Physionic 671 Ultrasonic Imager, Based on the 564
Tek 564 interconnecting sockets.png|564 Interconnecting Sockets
Physionic 671 3.jpg | Physionic 671 Ultrasonic Imager, Based on the 564
Tek 564 crt circuit.png|564 CRT Circuit
Physionic 671 4.jpg | Physionic 671 Ultrasonic Imager, Based on the 564
Tek 564 calibrator.png|564 Calibrator
Physionic 671 5.jpg | Physionic 671 Ultrasonic Imager, Based on the 564
Tek 564 storage circuit.png|564 Storage Circuit
Physionic 671 6.jpg | Physionic 671 Ultrasonic Imager, Based on the 564
</gallery>
</gallery>


====Internals====
==Components==
<gallery>
{{Parts|564}}
Tek564 left internals 4.jpg|Tektronix 564 Left Internals
{{Parts|RM564}}
Tek564 left internals 5.jpg|Tektronix 564 Left Internals
{{Parts|564B}}
Tek564 left internals 2.jpg|Tektronix 564 Left Internals
{{Parts|R564B}}
Tek564 left internals 3.jpg|Tektronix 564 Left Internals
Tek564 right internals 4.jpg|Tektronix 564 Right Internals
Tek564 right internals 5.jpg|Tektronix 564 Right Internals
Tek564 right internals 2.jpg|Tektronix 564 Right Internals
Tek564 right internals 7.jpg|Tektronix 564 Right Internals
Tek564 right internals 6.jpg|Tektronix 564 Right Internals
Tek564 right internals 8.jpg|Tektronix 564 Right Internals
Tek564 right internals 9.jpg|Tektronix 564 Right Internals
Tek_564_HV.jpg | Tektronix 564 HV Section - Cover Removed
</gallery>
 
====Third-party====
<gallery>
Physionic 671 1.jpg| [[Physionic 671|Physionic 671 Ultrasonic Imager]], based on 564
Physionic 671 2.jpg|Physionic 671 Ultrasonic Imager, based on 564
Physionic 671 3.jpg|Physionic 671 Ultrasonic Imager, based on 564
Physionic 671 4.jpg|Physionic 671 Ultrasonic Imager, based on 564
Physionic 671 5.jpg|Physionic 671 Ultrasonic Imager, based on 564
Physionic 671 6.jpg|Physionic 671 Ultrasonic Imager, based on 564
</gallery>


[[Category:560 series scopes]]
[[Category:560 series scopes]]
[[Category:Analog storage scopes]]
[[Category:Analog storage scopes]]

Latest revision as of 14:40, 18 August 2024

Manuals – Specifications – Links – Pictures

The Tektronix 564 is the storage scope of the 560 series, introduced in June 1962. It takes two 2- or 3-series plug-ins. The RM564 is the rack-mount version.

The 564 is a tube-based oscilloscope, whereas a later version, the 564B (1969), is fully solid state. MOD121N added auto-erase. The screen has bi-stable storage in two 4 cm × 10 cm sections, allowing independent saving and erasing of the upper and lower half.

The 564 was one of the mainframes offered for the Engine Analyzer System.

The designer of the 564 was Bob Shand.

Key Specifications

Bandwidth Determined by plug-in (up to 25 MHz available) or up to 1 GHz with 3-series sampling plugins
Writing speed ≥25 Div/ms with T5640-200; ≥100 Div/ms with T5640-201
Storage time At least 1 hour
CRT 8×10 Div @ 1 cm/Div, 3.5 kV acceleration

564 (external graticule): Standard CRT, T5640-200 (154-0410-00); Fast Writing Speed, T5640-201 (154-0418-00)

564B (internal graticule): Standard CRT, T5641-200 (154-0565-00); Fast Writing Speed, T5641-201 (154-0565-01)

Calibrator 564: 0.2 mV to 100 Vp-p in 18 2-5-10 steps, square wave at line frequency

RM564: 1 mV to 100 V in 6 decade steps, square wave at line frequency

564B: 4 mV to 40 Vp-p in 5 decade steps, square wave at 1 kHz, plus 40 VDC into high impedance, and 2 mV to 0.2 V into 50 Ohms in 3 decade steps.

Power 105−125 V or 210−250 V, 50 to 400 Hz, Convection cooling, thermal cut-off switch

564: 250 W maximum

564B: 196 W maximum

Weight Without plugins: 564 ~13.8 kg (30.5 lbs), 564B ~14.2 kg (31.25 lbs)

Steve Ditter says:

Tektronix offered two phosphors for the 564. You can determine which one you have by reading the CRT part number, visible in the window in the shield where the deflection plate connections are. 154-0410-00 is P200, which was the standard tube. The 154-0418-00 is the P201, which has faster writing rate, but at the expense of about 30% shorter useful life.

Links

Documents Referencing 564

Document Class Title Authors Year Links
NBSIR73-309 Random Sampling Time Base.pdf Article Random Sampling Oscilloscope Time Base Jim Andrews 1973

Documents Referencing 564A

(no results)

Documents Referencing 564B

Document Class Title Authors Year Links
070-0890-00.pdf Manual Engine Analyzer System 1968
Tekscope 1969 V1 N1 Feb 1969.pdf Article An Extended Value John Durecka 1969
Tekscope 1969 V1 N2 Apr 1969.pdf Article A New Insight Into Reciprocating Machinery Bill Verhoef 1969

Patents that may apply to 564B

Page Title Inventors Filing date Grant date Links
Patent US 3453403A Power selection device Eldon Hoffman 1966-08-18 1969-07-01

Internals

As in all 560 series scopes, the left plug-in directly drives the vertical deflection plates of the CRT, and the right plug-in directly drives the horizontal deflection plates.

Accessories

The 012-0102-00 Storage Oscilloscope Control Unit that works with the 549 also works with the 564B but not the 564. It provides (corded) remote reset of the sweep and independent erase of the upper and lower storage areas.

Pictures

564 External Views

564 Internal Views

564 Schematics

564 Versions

RM564

564B

564B with Auto Erase, MOD121N

R564B with Auto Erase, MOD121N

Third-Party Instruments Based on the 564

Components

Some Parts Used in the 564

Part Part Number(s) Class Description Used in
0G3 154-0291-00 Gas Discharge Tube (Voltage regulator) 85 V voltage reference 132 506 547 560 561 561A 561S 564 565 567 661 TU-4 Z Keithley 610
120-0296-00 120-0296-00 Discrete component power transformer 564
12AU7 154-041 154-0041-00 154-0287-00 Vacuum Tube (Dual Triode) dual medium-μ triode 104 104A 122 160 161 162 181 190 310 310A 316 317 3C66 502 502A 507 511A 512 516 517 517A 524 526 535 536 545 545A 545B 547 549 555 561 564 570 575 581 581A 585 585A C D E N Q Hickok 1825
12BH7 154-0046-00 Vacuum Tube (Dual Triode) dual triode 506 517A 561A 561S 564 567
5642 154-0051-00 154-0079-00 Vacuum Tube (Diode) directly-heated high-voltage rectifier 310 310A 316 317 360 453 502 502A 503 504 506 513 515 516 524 529 RM529 533 533A 535 536 543 543A 543B 545 545A 545B 547 551 555 556 560 561 561A 561S 564 567 570 575 581 581A 585 585A 647 647A
6AS7 154-020 154-0020-00 Vacuum Tube (Pentode) dual power triode 160 506 511A 512 513 517 517A 524 561 561A 561S 564
6AU6 154-0022-00 157-0073-00 157-0059-00 154-0284-00 Vacuum Tube (Pentode) RF pentode 107 160 181 190 60 2A60 72 3A72 3C66 310 310A 316 317 360 502 502A 506 511 511A 512 513 516 517 517A 524 526 529 RM529 531 531A 535 536 545 545A 546 547 549 555 561 561A 561S 564 565 567 570 575 581 581A 585 585A 80 C CA Q
6BL8 154-0278-00 Vacuum Tube (Triode/Pentode) triode-pentode combo 67 2B67 3B1 3B1S 3B2 3B3 3B4 503 504 506 516 549 561 561A 561S 564 565 567 Telequipment D52 Telequipment D56 Telequipment S31 Telequipment S32 Telequipment S32A Telequipment S51 Telequipment S52
6CZ5 154-0167-00 Vacuum Tube (Pentode) power pentode 317 502 506 526 555 561 561A 561S 564 565 567
6DJ8 154-0187-00 154-0305-00 Vacuum Tube (Dual Triode) dual triode 067-506 111 132 161 310A 316 317 502 502A 503 504 506 515 516 519 526 529 RM529 533 535 536 543 544 545 545A 545B 546 547 549 555 556 561A 561S 564 565 567 581 581A 585 585A 661 1A4 1S1 60 2A60 63 2A63 67 2B67 3A1 3A1S 3A2 3A3 3A6 3A7 72 3A72 75 3A75 4S2 51 3B1 3B1S 3B2 3B3 3B4 3M1 3S76 3T77 3T77A 9A1 9A2 1121 80 81 82 86 B O W Z Telequipment D56 Telequipment S32A Telequipment D52 S-311 Telequipment TD51 Telequipment S52 Telequipment S51 Telequipment Type A TU-4
7233 154-307 154-0307-00 Vacuum Tube (Triode) low-mu triode 132 506 561 561A 561S 564 565
T5640 154-0410-00 154-0418-00 154-0738-00 154-0738-01 CRT split-screen, bistable direct-view storage CRT with external graticule 564


Some Parts Used in the RM564

(no results)


Some Parts Used in the 564B

Part Part Number(s) Class Description Used in
2N3739 151-0201-00 Discrete component Silicon NPN power transistor 013-002 106 4501 561B R561B 564B R564B 568 7503 7504
STD932 152-0373-00 Discrete component 4.7 mA, 50 pF tunnel diode 31 1S2 115 564B R564B
T5641 154-0565-00 154-0565-01 154-0737-00 154-0737-01 CRT split-screen, bistable direct-view storage CRT 564B


Some Parts Used in the R564B

Part Part Number(s) Class Description Used in
2N3739 151-0201-00 Discrete component Silicon NPN power transistor 013-002 106 4501 561B R561B 564B R564B 568 7503 7504
STD932 152-0373-00 Discrete component 4.7 mA, 50 pF tunnel diode 31 1S2 115 564B R564B